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Technology at Plasma plus
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Plasma plus uses modern and innovative technology
Plasma plus coating technology
Flexible cathode system with up to four different target materials
Tried-and-tested range of coatings (AlTiN, AlTiSiN, AlCrTiN, TiN, TiCN, TiCCrN, ZrN, ZrCrN, TiAlN)
Volume: 750 to 1,000 shank tools per batch
Coating length 850 mm, 8 spindles with diam. 125 mm
Batch runtimes (AlTiN) approx. 5 hours
Compact design, all components are housed in a dust-free and water-cooled environment in an enclosure measuring H:2,100 mm, W:1,800 mm, L:2,400 mm
Freely accessible recipe editor
Well thought-out work safety concept, UL-compliant design
Vacuum system of coating machine
Precise and constant flow of gas
Symmetrical vessel construction, coating distribution, coating colour and properties uniform from top to bottom
Extremely precise and fast pressure regulation
Regulation is no longer based on the glass flow but instead is performed using the valve system
Small, maintenance-friendly valves
All components are easily accessible
Multistage, maintenance-free screw pump
Turbo pump with magnetic bearings
Chamber of coating machine
Quickly exchangeable interior lining for basic cleaning times < 2 hours; no tools necessary
No unnecessary sensors that need to be removed
Quickly exchangeable heating system with plug and one nut
Optimised heater cleaning program
Cooling system of coating machine
Optimum, cooled vaporisation sources
Independently controllable cooling circuits; energy-saving cooling matched to the specific process step
Robust double-walled stainless-steel vessel with uniform temperature distribution to minimise the required cooling performance
Arc cathode of coating machine
Pulsed DC power supply with an efficiency of 92 % to 94 %
Optimised magnet system for controlling the arc
Adapted source design to reduce large droplets
Flexible target change-over system
Variable and efficient etching process using various techniques
Uniform coating distribution across the entire coating surface; deviations < 0.1 µm
Electrics
80 kW / 125 A connection, 3 phases + neutral
4 cathodes 250 A incl. 4 x 6 kW pulsed rectifiers
15 kW pulsed bias up to 1,000 V
4 heaters (8 kW each) incl. integrated temperature monitoring
Controllable direct drive for the carousel with torque monitoring
Emergency power supply for the control circuit and turbo pump for controlled shutdown
Analysis tool for all electrical components
Beckhoff controller and fieldbus for all components
24-inch touchpanel PC incl. remote maintenance
Complete process documentation
Media
Cooling water connection with approx. 80 l/min with variable temperature feed between 15 °C and 23 °C
The cooling water is distributed through the system and regulated as required depending on the process step
Compressed air 6 bar, control air and flushing gas for the dry pump
Integrated 40 litre buffer tank for compressed air used for emergency shutdown
Cooling gas connection for rapid cooling, either He or N2
Flow controller for 4 process gases (Ar, H2, N2, C2H2), can be expanded to 6 for DLC processes
Vacuum and chamber
250 m² maintenance-free screw-type dry pump < 55 dB(A)
250 mm turbo molecular pump with magnetic bearings, maintenance-free
Pump times < 5 min
Maintenance-friendly VAT vacuum valves
Double-walled, fully cooled stainless-steel vessel
Maintenance-free, ferrofluid rotary unions
MKS vacuum measuring instruments (Profibus Baratron, Pirani, Penning, piezo, flow controller)
Automatic leak test
Equipment – Coating holders and carousels
Flexible and maintenance-free holder system
Double-guided sleeves – tools do not touch each other
No loading and wear of the pivot bearings
Flexibly exchangeable sleeves within certain diameter ranges
Reliable rotation
Catalogue on request
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