Technology

Coating Technology – Plasma plus

Flexible cathode system with up to four different target materials
Proven coating portfolio (AlTiN; AlTiSiN; AlCrTiN; TiN; TiCN; TiCCrN; ZrN; ZrCrN; TiAlN)
Volume: 750–1000 shank tools per batch
Coating length: 850 mm, 8 spindles with Ø 125 mm
Batch processing time (AlTiN): approx. 5 hours
Compact design: all components housed dust-free and water-cooled (H: 2100 mm; W: 1800 mm; L: 2400 mm)
Freely accessible recipe editor
Thoughtful work safety, UL-compliant design

Precise and constant gas flows
Symmetrical chamber design ensures uniform coating distribution, color, and properties from top to bottom
Highly accurate and fast pressure control
Regulation via valve system rather than glass flow
Maintenance-friendly small valves
All components easily accessible
Multi-stage, maintenance-free screw pump
Magnetically levitated turbo pump

Quickly replaceable inner lining for base cleaning in < 2 hours, no tools required
No unnecessary sensors to remove
Quick-change heating system with plug and a single nut
Optimized heating cleaning program

Optimally cooled evaporation sources
Independently adjustable cooling circuits; energy-efficient cooling adapted to each process step
Robust double-walled stainless steel chamber with uniform temperature distribution for minimal cooling power

Pulsed DC supply with 92–94% efficiency
Optimized magnetic system to control the arc
Tailored source design to reduce large droplets
Flexible target change system
Variable and efficient etching process using different methods
Uniform coating distribution across the entire coating area (deviation < 0.1 µm)

80 kW / 125 A connection, 3 phases + neutral
4 cathodes 250 A including 4 × 6 kW pulsed rectifiers
15 kW bias pulsed up to 1000 V
4 heaters × 8 kW each with integrated temperature monitoring
Adjustable direct drive for carousel with torque monitoring
Emergency power supply for control circuit and turbo pump for controlled shutdown
Analysis tool for all electrical components
Beckhoff control and fieldbus for all components
24-inch touch panel PC including remote maintenance
Complete process documentation

Cooling water connection approx. 80 L/min with adjustable inlet temperature 15–23 °C
Cooling water circuit divided within the system and regulated according to process step
Compressed air 6 bar for control and purge gas for dry pump
40-liter buffer tank for emergency shutdown integrated
Cooling gas connection for rapid cooling, optionally He or N2
4 process gas flow controllers (Ar; H2; N2; C2H2), expandable to 6 for DLC processes

250 m² maintenance-free screw dry pump < 55 dB(A)
250 mm magnetically levitated turbo molecular pump, maintenance-free
Pumping time < 5 minutes
Maintenance-friendly VAT vacuum valves
Double-walled, fully cooled stainless steel chamber
Maintenance-free ferrofluid rotary feedthroughs
MKS vacuum instruments (Profibus Baratron, Pirani, Penning, Piezo, Flow Controller)
Automatic leak test

Catalog Available on Request: info@plasma-plus-pvd.de