Technology

Plasma Plus Relies on Modern and Innovative Technology

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Coating Technology – Plasma plus

  • Flexible cathode system with up to four different target materials
  • Proven coating portfolio (AlTiN; AlTiSiN; AlCrTiN; TiN; TiCN; TiCCrN; ZrN; ZrCrN; TiAlN)
  • Volume: 750–1000 shank tools per batch
  • Coating length: 850 mm, 8 spindles with Ø 125 mm
  • Batch processing time (AlTiN): approx. 5 hours
  • Compact design: all components housed dust-free and water-cooled (H: 2100 mm; W: 1800 mm; L: 2400 mm)
  • Freely accessible recipe editor
  • Thoughtful work safety, UL-compliant design

Vacuum System – Coating Plant

  • Precise and constant gas flows
  • Symmetrical chamber design ensures uniform coating distribution, color, and properties from top to bottom
  • Highly accurate and fast pressure control
  • Regulation via valve system rather than glass flow
  • Maintenance-friendly small valves
  • All components easily accessible
  • Multi-stage, maintenance-free screw pump
  • Magnetically levitated turbo pump

Chamber – Coating Plant

  • Quickly replaceable inner lining for base cleaning in < 2 hours, no tools required
  • No unnecessary sensors to remove
  • Quick-change heating system with plug and a single nut
  • Optimized heating cleaning program

Cooling System – Coating Plant

  • Optimally cooled evaporation sources
  • Independently adjustable cooling circuits; energy-efficient cooling adapted to each process step
  • Robust double-walled stainless steel chamber with uniform temperature distribution for minimal cooling power

ARC Cathode – Coating Plant

  • Pulsed DC supply with 92–94% efficiency
  • Optimized magnetic system to control the arc
  • Tailored source design to reduce large droplets
  • Flexible target change system
  • Variable and efficient etching process using different methods
  • Uniform coating distribution across the entire coating area (deviation < 0.1 µm)

Electrical System

  • 80 kW / 125 A connection, 3 phases + neutral
  • 4 cathodes 250 A including 4 × 6 kW pulsed rectifiers
  • 15 kW bias pulsed up to 1000 V
  • 4 heaters × 8 kW each with integrated temperature monitoring
  • Adjustable direct drive for carousel with torque monitoring
  • Emergency power supply for control circuit and turbo pump for controlled shutdown
  • Analysis tool for all electrical components
  • Beckhoff control and fieldbus for all components
  • 24-inch touch panel PC including remote maintenance
  • Complete process documentation

Utilities

  • Cooling water connection approx. 80 L/min with adjustable inlet temperature 15–23 °C
  • Cooling water circuit divided within the system and regulated according to process step
  • Compressed air 6 bar for control and purge gas for dry pump
  • 40-liter buffer tank for emergency shutdown integrated
  • Cooling gas connection for rapid cooling, optionally He or N2
  • 4 process gas flow controllers (Ar; H2; N2; C2H2), expandable to 6 for DLC processes

Vacuum and Chamber

  • 250 m² maintenance-free screw dry pump < 55 dB(A)
  • 250 mm magnetically levitated turbo molecular pump, maintenance-free
  • Pumping time < 5 minutes
  • Maintenance-friendly VAT vacuum valves
  • Double-walled, fully cooled stainless steel chamber
  • Maintenance-free ferrofluid rotary feedthroughs
  • MKS vacuum instruments (Profibus Baratron, Pirani, Penning, Piezo, Flow Controller)
  • Automatic leak test

Equipment – Coating Holders and Carousels

  • Flexible and maintenance-free holder system
  • Double-guided sleeves – no contact between tools
  • No load or wear on rotary bearings
  • Flexibly exchangeable sleeves within specific diameter ranges
  • Reliable rotation

Catalog Available on Request: info@plasma-plus-pvd.de